Micro optics
We fabricate micro optical elements like apertures, optical encoders or optical gratings by patterning of metallic layers on optical transparent substrates. For wave lengthes where the transparancy of glas is to low elements like apertures or grids can be made of etched silicon.
Optical apertures and encoder disks:
By structuring a metal layer on a glass substrate we can fabricate transmission apertures or code discs for encoders with any design.
Typical properties:
- Minimum feature size: about 500 nm
- Substrate: e.g. Glass ~ 200 µm – some mm thickness
- Material: e.g. Chromium and other metals
- Optional anti reflex coating
Technology and Competencies
Optical gratings:
Also by patterning a metal layer on a glass substrate we can manufacture optical transmission gratings. In contrast, we make reflection gratings by etching the lattice structure into a silicon substrate. To increase the reflectivity these structures can also be metalized.
Typical properties:
- Minimum feature size: about 500 nm
- Substrate: e.g. glass for transmission gratings or coated silicon for reflection gratings
- Grid material: e.g. Chromium or other metals
Technology and Competencies:
Anti reflective coating:
With our physical and chemical deposition processes, we can apply anti reflective coatings that are optimized for a certain wavelength, to metallic or transparent surfaces. This can reduce undesirable reflections from optical elements.
Typical properties:
- Optimized for discrete wavelengths
- Remaining reflection on metals: <10%
- Remaining reflection on glass: <2%
Technology and Competencies:
optimized for 550 nm wavelength
reflectivity < 2%
optimized for 550 nm wavelength
reflectivity < 1%
Deep UV Optics:
For light wavelengths below 300 nm, the optical transmission of some glasses decreases rapidly. One possibility to fabricate optical elements for this application such as apertures, are etched structures where no material damps the light that passes the aperture. Such elements can be fabricated in silicon with our etching technology or can be made of metals by electroplating.
Typical properties:
- Usable Area: about 100 mm
- Minimum grid width: approx. 1µm
- Material: silicon or metals
Technology and Competencies: