Electron optics
Grids as electron optical energy filter can be made of silicon or metal with bars having high aspect ratios to achieve high electron transparency. Electrodes with user defined design can also be made of silicon or metals. Our micro tips with radii of a few nanometer can be used as electron emitters for instance.
Gratings as elements for electron optics:
For the acceleration of free electrons in vacuum or to build up energy filters, gratings are used in electron optics. Micro fabricated electron meshes provide the advantage that they allow high electron transmission by very small bars.
Typical properties:
- Minimum bar width: about 1µm
- Maximum diameter: ~100 mm
- Material: e.g. Silicon, Copper, Gold
Technology and competencies:
Electrodes:
To generate desired electrical fields electrode structures are required in electron optics. By micro electroplating we are able to realize complex electrode geometries.
Typical properties:
- Electrode thickness: a few µm up to some 100 µm
- Material: e.g. Silicon, Copper, Gold
Technology and competencies:
Electron emitter:
To generate free electrons, electron emitters are required in electron optics. By the use of micro tips with tip radii of less than 10 nm field emitter can be fabricated, which already emit at low voltages.
Typical properties:
- Tip radii: a few 10 nm
- Material: e.g. Silicon and Silicon with additional layers
Technology and competencies:
