X-Ray Optics
X-ray optical apertures can made of gold for instance. They are either self supporting or fabricated on an x-ray transparent membrane. Scattered light absorbers are also made of gold or of silicon deposited with an absorbing material. They have bars with a high aspect ratio to achieve a good scattered light absorption while having high transparency.
X-Ray apertures:
Apertures for X-ray optical applications consist of an x-ray absorbing material. They can be either self supporting or applied to an X-ray transparent membrane. We realize X-ray apertures with electro plated gold features for example.
Typical properties:
- Minimum feature size: approx. 1 µm
- Substrate: Self supporting or on a membrane of silicon nitride or polymer
- Material: e.g. Gold
Technology and competencies:
X-ray Gratings:
Also by micro electro deposition of gold, absorption gratings for X-rays can be prepared. In addition, we can realize phase contrast gratings by deep etching of silicon. These grids can either be self supporting or applied on a membrane.
Typical properties:
- Minimum feature size: about 1 µm
- Substrate: Self supporting or on a membrane of silicon nitride or polymer
- Material: Gold or Silicon
Technology and competencies:
Scattered light absorber:
To improve the quality of X-ray projection images scattered light absorbers are used.They absorb X-ray photons which are scattered on the object to be examined before hitting on the X-ray film. Such scattered light absorbers consist of a cross grating with a high aspect ratio made of an X-ray absorbing material. This can be realized by micro electro deposition or lattices that are etched out of silicon, and are coated with an absorbing material.
Typical properties:
- Aspect ratio: > 10
- Material: Gold or Silicon with additional coating
Technology and competencies
cross sectional view