Nanoanalytics
We fabricate cantilever sensors with thicknesses beginning at a few 100nm out of silicon, silicon nitride or silicon dioxide. We fabricate single cantilever chips as well as cantilever arrays. We can integrate mechanical microtips or optical transparent microtips. Also heating elements can be integrated.
Cantilever sensors:
Our experience in manufacturing of cantilever sensors enables us to implement customer specific requirements. So we can fabricate cantilever in any geometry out of silicon, silicon dioxide or silicon nitride. Cantilever thicknesses can start already at 500 nm. Also heated cantilever can be fabricated out of silicon.
Typical properties:
- Cantilever thickness: approx. 500 nm – some µm
- Material: Silicon, Silicon nitride, Silicon dioxide
Technology and competencies
Atomic force sensors (AFM):
Based on our expertise in manufacturing of micro tips in combination with our technology to generate cantilever sensors we are able to produce customized atomic force sensors. Thus, we can create custom made single sensors or AFM arrays. The sensors can be made of materials such as silicon or silicon nitride, but may also be electrically conductive and have a wire bond on a PCB.
Typical properties:
- Tip heights: a few µm
- Material: Silicon, Silicon nitride, Silicon oxide, also with metalization
Technologische Verfahren:
each electrically wired
Near field optical sensors (SNOM):
In addition to mechanical force sensors, we are also able to produce near field optical sensors. These consist of an optically transparent core which is coated with an optically dense metalization. Only the front tip is free of metal, so that light can leak onto the sample.
Typical properties:
- Diameter of aperture: about 100 nm
- Optical connection: via glass fiber
Technology and competencies:
