Micro fluidics
We prefer to manufacture microfluidic structures such as channels, reservoirs, mixers and filters from silicon. We create encapsulations, e.g. from glass, by anodic bonding of glass with silicon.
Micro fluidic channels:
Based on our silicon etching processes we manufacture micro fluidic channels, reservoirs and mixing structures in silicon substrates. For the connection of inlet and outlet pipes we etch holes through the chips. To seal the fluidic channels, the silicon chips are bonded anodically with a glass substrate. The use of silicon and glass makes the fluidic component chemically very inert and bio compatible.
Typical properties:
- Minimum feature size: about 500 nm
- Substrate: Silicon and Glass
Technology and competencies
fabricated for University of New South Wales, Australia
Microfluidic Filters:
Filter elements made of silicon, which are ideal for biological applications, can also be realized easily. Smallest vias from about 500 nm in diameter can be fabricated.
Typical properties:
- Minimum feature size: about 500 nm
- Substrate: Silicon
Technology and competencies