Metallic micro parts

Based on lithographically produced forms that are filled with electroplated metal, we are able to produce precise micro components made of different metals. These micro metal components have vertical side walls and can have almost any design in lateral dimensions. In order to realize more complex components, we are able to realize the components in a multilevel way. The achievable high aspect ratios allows narrow metal bars or narrow slots in the component. The possible fineness of the structures and the associated complexity exceeds mechanical precision engineering by far. Due to the parallel production and its independence of the complexity of the components regarding the manufacturing, this method is also superior to mechanical precision engineering in terms of price.

Unlike other micro fabricated materials, metals have the typical properties of high strength and high elasticity.

micro part made of Gold for an electron microscope
micro part made of Gold for an electron microscope
SEM image of a micro part made of Gold
SEM magnification of the above part

Application:

The most common application of metallic micro parts are mechanical elements like gears, grippers, spring elements, guides, strainers and many more.

Another application is the construction of mold inserts for injection molding or hot embossing.

micro gears made of Nickel
Nickel gears h=0,5mm

Specifications:

  • Thickness: 1-500 µm
  • Aspect ratio: 15 for channels, 10 for bars
  • Side wall angle: 90+/-1°
  • Min feature size: 1µm